Global modeling of hiPIMS systems: Transition from homogeneous to self organized discharges
2014
High Power Impulse Magnetron Sputtering (HiPIMS) discharges are characterized by a near-target magnetized region, where the confined electrons ionize a consistent fraction of both the gas and the sputtered neutrals. HiPIMS discharges are dynamical systems, evolving through different regimes of operation: both the plasma composition and the plasma spatial organization change during the pulse [1].
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