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4H-SiC (11-20) Epitaxial Growth
4H-SiC (11-20) Epitaxial Growth
2000
Tsunenobu Kimoto
Toshihiro Yamamoto
Zhi Yong Chen
Hiroshi Yano
Hiroyuki Matsunami
Keywords:
Epitaxy
Metallurgy
Composite material
Materials science
deep level
Correction
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