Optical methods for the characterization of mechanical properties of thin silicon films

Holographic interferometry and contouring are two optical methods used for the characterization of mechanical properties of thin films. Therefore, a phase measurement interferometry applied to these methods is explained. These solutions are discussed in terms of accuracy and sensibility. An application on a bulge test is proposed and experimental results are compared with finite element calculation. In each case, the good agreement between theory and experience allows us to validate the apparatus.© (1994) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.