A Monolithic CMOS Microwave Heater

A monolithic microwave heater is fabricated using 0.18-μm CMOS technology. The monolithic microwave heater consists of an oscillator, an amplifier, and temperature sensors. The load inductor of the amplifier is used as the heat applicator and surrounded by the temperature sensors for temperature detection. Consuming the power of 113.6 mW, the amplifier delivers an output power ~13.3 dBm (~21.2 mW) at 2.36 GHz. The on-chip temperature sensor provides the detection range from 20 °C to 40 °C with the temperature coefficient around 50 mV/°C. When 80 mg of agar phantom is placed above the microwave heater, its temperature is raised by 4.9 °C in 60 min.