The dielectric film and the dielectric device and a manufacturing method thereof
2009
By attaching single-layer or multi-layer niobate nanosheets as a dielectric film, also by the dielectric film structure to the dielectric element to place the other electrodes on the surface of the dielectric film, the nano-domain providing a dielectric element to achieve a high dielectric constant and good dielectric properties at the same time. Also, composition deviation accompanying deterioration and that of the substrate surface by thermal annealing, a problem electrical mismatch, relative dielectric constant when thinned to a nano level decreases in the manufacturing process, essentially as leakage current increases "size effect" wipe out problems, unique properties and high tissue having a niobium acid nanosheets, utilizing structural controllability and substrate interface deterioration also provides a manufacturing method for the device at low temperatures without the influence of the composition deviation.
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