Sulfur reduction from SF/sub 6/ by pulsed electronic beam

The experimental research results of sulfur hexafluoride decomposition in a mixture with nitrogen or hydrogen under the pulse electronic beam action are presented. The data of gas mixture composition changes in a reactor, measured by a mass-spectrometer are stated, electron beam power inputs on sulfur hexafluoride decomposition are given. Mathematical modeling of gas atmosphere low-temperature plasma (N/sub 2/ and SF/sub 6/), (H/sub 2/ and SF/sub 6/) at a pulse electronic beam injection are carried out.