Active species irradiation device, the active species irradiation method

Providing active species irradiation device capable of irradiating well active species in a non-contact plasma source with respect to the irradiated object (active oxygen and active nitrogen) efficiency. Active species irradiation apparatus 100 according to the present invention, there is provided a chamber 110 in which a plasma generating gas and the active species generating gas flows, the chamber 110 having an active species irradiation port 110c active species is emitted, a portion of the chamber 110 a is an upstream electrode 120 located in the upstream portion of the flow of the plasma generation gas, a portion of the chamber 110, downstream electrode than the upstream electrode 120 located downstream part of the flow of the plasma generating gas a active species irradiation device 100 and a 130, the chamber 110, the active species generating gas is configured to flow between said upstream electrode 120 the active species irradiation port 110c.