A simple quartz ampoule opener for damageless extraction of semiconductor ingots

Semiconductor ingots grown in quartz ampoules sometimes adhere to the walls of the ampoules which also may not always have a perfect regular cylindrical shape. This often results in the breaking of fragile materials when extracted from the ampoules. A simple apparatus using a compressed-air motor and a circular diamond saw operating without water is described, which realises longitudinal and transverse grooves along and across the ampoules. Then, by applying a controlled pressure on these grooves, the quartz ampoules can be cleaved into several shell parts which are easily removed. Ingots of 16-25 mm diameter are thus extracted without any damage.