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Fluorosilicate Glass (FSG) Outgassing Induced Aluminum Bond Pad Corrosion during Post-Fab Wafer Storage
Fluorosilicate Glass (FSG) Outgassing Induced Aluminum Bond Pad Corrosion during Post-Fab Wafer Storage
2012
Hua Younan
Nistala Ramesh Rao
Chen Shuting
Keywords:
Outgassing
Corrosion
Metallurgy
Wafer
Aluminium
Fluorosilicate glass
Materials science
Correction
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