Local annealing of complex mechanical devices: a new approach for developing monolithic micro-devices

Yves Bellouard,Thomas Lehnert,J.-E. Bidaux,Thomas Sidler,Reymond Clavel,R. Gotthardt

Local annealing of complex mechanical devices: a new approach for developing monolithic micro-devices

1999

Yves Bellouard
Thomas Lehnert
J.-E. Bidaux
Thomas Sidler
Reymond Clavel
R. Gotthardt

Keywords: shape memory alloys ; laser annealing ; local annealing ; monolithic design Reference EPFL-CONF-210170 Record created on 2015-07-21, modified on 2016-08-09

Keywords:

Annealing (metallurgy)
Laser
Shape-memory alloy
Electronic engineering
Materials science

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