Anomalous carbon clusters in 4H-SiC/SiO2 interfaces

We investigated a metal-oxide-semiconductor interface of dry-oxidized (000 1 ¯) 4H-SiC, which was known as the most electrically deteriorated SiC MOSFET, by electrically detected magnetic resonance (EDMR) and observed a signal with an isotropic g factor (2.0024) and magnetic-field angular dependent signal widths. Judging from the g factor, the signal comes from sp2-bonded carbon clusters. In addition, we found that the angular dependence of EDMR signal widths was caused by two-dimensional dipolar broadening with exchange interaction between electron spins. However, the density of electron spins or carbon clusters was 5.4 × 1013 cm−2, which was not high enough for exchange interaction. Therefore, we propose inhomogeneous distribution of carbon clusters in the interface. At the interface, π* peaks from sp2-bonded carbon atoms were detected by electron energy loss spectroscopy. Scanning the electron beams along the interface revealed uneven existence of the π* peaks, which also proved that the sp2-bonded car...