A method for cleaning objects by means of ultrasound

is provided method for cleaning articles such as in particular semiconductor elements in a basin (5) with liquid (6) and at least one sound source field (8), wherein the objects (2) on a transport device (3) in contact with the liquid continuous the basin (5) to be transported, and the at least one sound source field (8) comprising a plurality of vibration sources (8a), which couple sound (8b) in phase in the liquid (6), optionally takes one of the following positions: I. arrangement of the at least one sound source field (8) stationary and oriented obliquely to the plane (9) of the objects to be cleaned (2); or . II arrangement of the at least one sound source field (8) and movable obliquely aligned to the plane (9) of the objects to be cleaned (2), wherein the movement parallel to the transport direction (4) is carried out; or III. Arrangement of the at least one sound source field (8) and movable parallel aligned to the plane (9) of the objects to be cleaned (2), wherein the movement vertically to the transport direction (4) is carried out; or...