SIMULATION OF ELECTRON TRANSPORT IN NEWLY DESIGNED LARGE VOLUME ION SOURCE

Numerical simulation for electron transport in newly designed large volume ion source is carried out by simultaneously solving several differential equations. It should be noted from the computation that the electron produced by rf discharge at the circumferential region of large volume ion chamber transports to the central region of chamber by the gradient of magnetic flux density. This computational result is supported quantitatively by experimental results published recently.1 It is also found that the increase in rf frequency decreases the cyclic drift distance in x (circumferential) direction and increases the frequency of cyclic drift motion.