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Influence of the normal modes on the plasma uniformity in large scale CCP reactors.
Influence of the normal modes on the plasma uniformity in large scale CCP reactors.
2016
Denis Eremin
Ralf Peter Brinkmann
Thomas Mussenbrock
Barton Lane
Masaaki Matsukuma
Peter L. G. Ventzek
Keywords:
Plasma
Normal mode
Analytical chemistry
Materials science
Mechanics
Correction
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