A micron‐sized nanoporous multifunction sensing device

In this work, a capacitive sensor based on Anodic Aluminium Oxide (AAO) porous structures has been developed. In some cases, the pores have been also conformally coated with a high chemical pure SiO 2 by means of Atomic Layer Deposition (ALD). Temperature measurements have been done in DI water obtaining a response of 5 nF/°C. pH measurements have been performed and the responses obtained are between 0.2 and 1 nF/pH. The reproducibility of the sensors has been found to be high and a larger hysteresis effect has been observed in the samples with alumina pores rather than in the SiO 2 ones. The hysteresis seems to be related to the charging of the oxide upon application of a voltage.