Influence of Ti-content in the bottom electrodes on the ferroelectric properties of SrBi2Ta2O9 (SBT)

Günther Schindler,Walter Hartner,Vikram Joshi,Narayan Solayappan,Gary F. Derbenwick,Carlos Mazure

Influence of Ti-content in the bottom electrodes on the ferroelectric properties of SrBi2Ta2O9 (SBT)

1997

Günther Schindler
Walter Hartner
Vikram Joshi
Narayan Solayappan
Gary F. Derbenwick
Carlos Mazure

Abstract Stress behavior, results of AES analysis and electrical properties of SBT in dependence of electrode structure and annealing conditions are discussed. Evidence for degradation of the electrical properties of SBT due to diffusion of Ti is presented.

Keywords:

Inorganic chemistry
Annealing (metallurgy)
Electrode
Chemistry
Ferroelectricity
Analytical chemistry
ferroelectric thin films
Degradation (geology)
Chemical engineering

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