A thin-film magnetoresistive angle detector

An overview is given of the results of our research on a contactless angle detector based on the anisotropic magnetoresistance effect (AMR effect) in a permalloy thin film. The results of high-temperature annealing treatment of the pemalloy film are discussed. Such a treatment suppresses the effects of the uniaxial magnetic anisotropy that is present in a permalloy thin film and increases the AMR effect, thus improving the detector signal. The performance of the detector throughout a temperature range of 20 to 120 °C and the results of heat treatment at 125 °C for 1 week have been tested.