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Fabrication of GaN-μLED array using element isolation technology by Boron ion implantation
Fabrication of GaN-μLED array using element isolation technology by Boron ion implantation
2020
Futoshi Yoshimura
Kouji Higashimoto
Akihiro Wakahara
Keisuke Yamane
Keywords:
Optoelectronics
optical integrated circuit
Boron
Materials science
Fabrication
Ion implantation
Correction
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