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Helium ion milling of HSQ covered graphene: Control of substrate swelling and imaging disorder
Helium ion milling of HSQ covered graphene: Control of substrate swelling and imaging disorder
2016
Marek E. Schmidt
Ahmed Hammam
Manoharan Muruganathan
Shinichi Ogawa
Hiroshi Mizuta
Keywords:
Helium
Graphene
Ion milling machine
Substrate (chemistry)
Analytical chemistry
Inorganic chemistry
Materials science
Swelling
Nanotechnology
Correction
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