Old Web
English
Sign In
Acemap
>
Paper
>
Novel Storage-Node Contacts with Stacked PCM-Sp-TiN Barrier for MIM-Ru/Ta2O5/Ru Capacitors in Giga-Bit DRAMs
Novel Storage-Node Contacts with Stacked PCM-Sp-TiN Barrier for MIM-Ru/Ta2O5/Ru Capacitors in Giga-Bit DRAMs
2003
Tsuyoshi Kawagoe
Yoshitaka Nakamura
Keiji Kuroki
Isamu Asano
Hidekazu Goto
Naruhiko Nakanishi
Keywords:
Capacitor
Electronic engineering
Giga-
Materials science
Tin
Optoelectronics
Dram
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]