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Photonic integration by Reactive Ion Etching and selective regrowth using Chemical Beam Epitaxy
Photonic integration by Reactive Ion Etching and selective regrowth using Chemical Beam Epitaxy
1997
C.A. Verschuren
As Bloot
Pj Harmsma
Cgm Vreeburg
Ys Yok-Siang Oei
Maarten Leijs
H. Vonk
Jh Joachim Wolter
Keywords:
Reactive-ion etching
Photonics
Chemical beam epitaxy
Analytical chemistry
Materials science
Optoelectronics
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