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Study on electron-beam-induced reactions of methyl α-allyloxymethyl acrylic polymer
Study on electron-beam-induced reactions of methyl α-allyloxymethyl acrylic polymer
2018
Yuji Hosaka
Takafumi Kondoh
Tomoko Gowa Oyama
Tomoya Uchida
Mitsumasa Taguchi
Yoichi Yoshida
Masakazu Washio
Keywords:
Photochemistry
Organic chemistry
Polymer
Tetrahydrofuran
Poly(methyl methacrylate)
Cathode ray
Materials science
electron beam resist
acrylic polymer
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