Enhancement of negative hydrogen ion production in an electron cyclotron resonance source

In this paper, we present a method for improving the negative hydrogen ion yield in the electron cyclotron resonance source with driven plasma rings where the negative ion production is realized in two stages. First, the hydrogen and deuterium molecules are excited in collisions with plasma electrons to high-laying Rydberg and high vibration levels in the plasma volume. The second stage leads to negative ion production through the process of repulsive attachment of low-energy electrons by the excited molecules. The low-energy electrons originate due to a bombardment of the plasma electrode surface by ions of a driven ring and the thermoelectrons produced by a rare earth ceramic electrode, which is appropriately installed in the source chamber. The experimental and calculation data on the negative hydrogen ion generation rate demonstrate that very low-energy thermoelectrons significantly enhance the negative-ion generation rate that occurs in the layer adjacent to the plasma electrode surface. It is found that heating of the tungsten filaments placed in the source chamber improves the discharge stability and extends the pressure operation range.