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Lean Integration of p- and n-type polySi Passivating Contacts Activated via Short or Long Annealing
Lean Integration of p- and n-type polySi Passivating Contacts Activated via Short or Long Annealing
2020
Sylvain Nicolay
C. Ballif
Matthieu Despeisse
F-J Haug
Gabriel Christmann
Antoine Descoeudres
Gizem Nogay
Andrea Ingenito
Christophe Allebe
J.J. Diaz Leon
Keywords:
Lean integration
Annealing (metallurgy)
Chemical engineering
Materials science
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