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Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor
Formation of Nanostructured Relief of TiN—Fe Heterostructures in Hybrid Helicon-Arc Plasma Reactor
2016
E. M. Rudenko
I. V. Korotash
D. Polotskiy
L. S. Osipov
M. V. Dyakin
T A Prikhna
A. P. Shapovalov
Keywords:
Physics
Atomic physics
Heterojunction
Plasma
Arc (geometry)
Tin
Helicon
plasma reactor
Correction
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