Old Web
English
Sign In
Acemap
>
Paper
>
Ozonated DI-Water for Clean Chemical Oxide Growth
Ozonated DI-Water for Clean Chemical Oxide Growth
1998
Ingrid Cornelissen
Marc Meuris
K. Wolke
M. Wikol
Lee M. Loewenstein
Geert Doumen
Marc Heyns
Keywords:
Solubility
Oxide
Materials science
Inorganic chemistry
Organic chemistry
Ozone
Environmental chemistry
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
5
Citations
NaN
KQI
[]