Detection and depth profiling of 19F using a resonance at 2313 keV in the 19F(α,p)22Ne nuclear reaction

Abstract Cross section measurements are reported for the p 0 and p 1 proton groups from the 19 F(α,p) 22 Ne nuclear reaction in the energy range 2150–2520 keV at a reaction angle of 135°. A narrow resonance at 2313 keV incident energy is shown to be useful in detecting and depth profiling 19 F in thin films. Computer simulation is used to find F concentration profiles which are consistent with the measured reaction yield curves. Calculations of the depth resolution of this resonance and that of the 340 keV resonance in the 19 F(p, αγ) 16 O reaction are compared for a specific target.