Small Force Metrology for AFM, Stylus Instruments, CMM and Nanoindenter

With the increasing spread of soft polymer products the calibration of probing forces of atomic force microscopes, stylus instruments, coordinate measuring machines and nanoindenters becomes more and more important in order not to scratch the surface of these products during quality control. New sensors and reference springs for force calibration and new calibration methods for these devices will be presented along with some comparison measurements revealing the status of force and stiffness calibration. The contribution closes with an outlook on the current status of probing force standardization.