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Defects and electrical properties in Al-implanted 4H-SiC after activation annealing
Defects and electrical properties in Al-implanted 4H-SiC after activation annealing
2019
Yidan Tang
Xinyu Liu
Zheng-Dong Zhou
Yun Bai
Chengzhan Li
Keywords:
Annealing (metallurgy)
Optics
Physics
Optoelectronics
Correction
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