In lens BSE detector with energy filtering

Abstract We present a new type of an in-lens detector designed for Thermo Fisher Scientific (FEI) electron microscopes with the Elstar column. A key feature of it is high-pass energy filtering to enable the detection of low-loss backscattered electrons with their energy close to the primary beam energy. We show an application of the detector in imaging of a biological sample where the signal from these electrons leads to a significant improvement in resolution.