Integration of semiconductor Mach-Zehnder modulator with tunable-wavelength laser diode

A semiconductor Mach-Zehnder modulator was integrated with a tunable-wavelength laser by using monolithic and hybrid integration techniques. Tunable-wavelength 40-Gbit/s DPSK modulation and 10-Gbit/s NRZ modulation were successfully demonstrated for hybrid and monolithic devices, respectively.