Magnetron with tubular target
2010
Magnetron device comprising a at least one side mounted tube target (1) and at least one side mounted magnetic system (3), wherein the tube target (1) comprises a one- or multi-part carrier tube (11) which is covered on the outside with a coating material (12), wherein an end portion of the support tube (11) is free from coating material (12), characterized in that a radially extending aperture means (5) is mounted on the outside of the coating material free end portion (13) of the support tube (11), (between the aperture means 5) and the support tube (11) at least one connecting element (6) is arranged, which comprises at least one ball, one arranged in the longitudinal direction of the carrier tube pin, a wedge or a key.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI