Effect of the measuring mirror surface shapeerror on ruled groove straightness and thegrating diffraction wavefront

Measuring mirror requirements and their impact on groove errors are related to the error compensation strategy for a ruling engine. We analyze why the measuring mirror of the CIOMP-6 engine affects the groove straightness and the grating diffraction wavefront. We study a theoretical model of the relationship between the measuring mirror’s surface shape error and the grating wavefront, propose a requirement for the measuring mirror surface shape error, and reprocess the measuring mirror. Comparative ruling experiments prove that the grating’s wavefront quality at the diffraction order along the groove direction improved significantly after reprocessing of the measuring mirror.