Quick cooling method for vacuum process equipment

Rapidly cooling method for vacuum processing equipment, comprising: - checking the operation state of all heat sources and pumps of the vacuum processing system, switching off or disconnecting all the heat sources and pumps of the vacuum processing system in operation; subsequently: - Buffer cooling, that is, admitting a cooling gas into the vacuum processing unit to a predetermined first target pressure, determining the temperature of the cooling gas and comparing the detected temperature with a predetermined first target temperature, pumping of the cooling gas from the vacuum processing system, when the measured temperature is equal to the first target temperature; subsequently: - Spulkuhlen, ie purging of the vacuum processing system by simultaneously introducing and pumping of the cooling gas at a predetermined second target pressure, measuring the temperature of the cooling gas as it leaves the vacuum processing system and compared with a predetermined second target temperature, and finishing the rinsing, if the measured temperature is equal to the second set temperature is . wherein the first and / or second target pressure is continuously or stepwise increased.