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Line beam processing for laser lift‐off of GaN from sapphire
Line beam processing for laser lift‐off of GaN from sapphire
2012
Ralph Delmdahl
Rainer Pätzel
Jan Brune
Rolf Senczuk
Christian Goßler
Rüdiger Moser
M. Kunzer
Ulrich T. Schwarz
Keywords:
Laser
Nuclear magnetic resonance
Lift (force)
Beam (structure)
Sapphire
Physics
Condensed matter physics
Optics
Correction
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