Fabrication of a Multifunctional Photonic Integrated Chip on Lithium Niobate on Insulator Using Femtosecond LaserAssisted Chemo-Mechanical Polish

We report fabrication of a multifunctional photonic integrated chip on lithium niobate on insulate (LNOI), which is achieved by femtosecond laser assisted chemo-mechanical polish. We demonstrate a high extinction ratio beam splitter, a 1 * 6 optical switch, and a balanced 3 * 3 interferometer on the fabricated chip by reconfiguring the microelectrode array integrated with the multifunctional photonic circuit.