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Residual stress and microstructural evolution in tantalum oxide coatings on silicon nitride.
Residual stress and microstructural evolution in tantalum oxide coatings on silicon nitride.
2005
C. M. Weyant
K. T. Faber
J. D. Almer
J. V. Guiheen
Xfd
Suf-Usr
Keywords:
Silicon nitride
Microstructure
Tantalum oxide
Metallurgy
Chemistry
Residual stress
microstructural evolution
Correction
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