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Metal-Dielectric Sidewall Scattering Measurements with Ballistic Electron Emission Microscopy
Metal-Dielectric Sidewall Scattering Measurements with Ballistic Electron Emission Microscopy
2014
Chris Durcan
Robert Balsano
V. P. LaBella
Keywords:
Dielectric
Scattering
Ballistic electron emission microscopy
Analytical chemistry
Materials science
Metal
Molecular physics
Correction
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