With a transparent conductive film transparent substrate and a manufacturing method thereof, and a photoelectric conversion element including the substrate

The present invention provides a transparent substrate having a transparent conductive film having a high surface roughness even with a small thickness. Production method of the present invention, a metal compound on a transparent substrate, oxidizing material and supplying a source gas containing hydrogen chloride, the transparent conductive film composed mainly of crystalline metal oxide on a transparent substrate by thermal decomposition oxidation includes the step of forming the above steps, a first step the molar ratio of hydrogen chloride to the metal compound in the raw material gas is 0.5 to 5, the in the first step are the above molar ratio is 2 to 10 a larger molar ratio second step includes in this order. According to the present invention, in 300nm~750nm the thickness of the transparent conductive film can provide a transparent conductive film with a transparent substrate haze ratio is 15% or more.