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Electrical property of HfO x N y HfO 2HfO x N y sandwich-stack films
Electrical property of HfO x N y HfO 2HfO x N y sandwich-stack films
2006
Ran Jiang
Erqing Xie
Zhiyong Chen
Zhenxing Zhang
Keywords:
Analytical chemistry
Dielectric
Materials science
Inorganic chemistry
Leakage (electronics)
Correction
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