Realization of high Tc superconducting microstrip filter for communication

A high temperature superconductor microstrip filter at Ku-band was designed and fabricated. YBa/sub 2/Cu/sub 3/O/sub 7-x/ epitaxial thin films were grown on MgO substrates by rf-sputtering deposition. The filter patterns on the YBa/sub 2/Cu/sub 3/O/sub 7-x//MgO film were generated using conventional photolithography and EDTA etching. Experimental results for the YBa/sub 2/Cu/sub 3/O/sub 7-x/ superconducting filter in terms of frequency response, frequency band, and other characteristics, were reported. The filter performance was superior to that of filters fabricated from Cu-metal films.