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Effect of Annealing on the Electrical and Optical Properties of MgZnO Films Deposited by RF Magnetron Sputtering
Effect of Annealing on the Electrical and Optical Properties of MgZnO Films Deposited by RF Magnetron Sputtering
2020
Maki Kushimoto
Tadayoshi Sakai
Yoshihiro Ueoka
Shigekazu Tomai
Satoshi Katsumata
Manato Deki
Yoshio Honda
Hiroshi Amano
Keywords:
Condensed matter physics
Physics
Annealing (metallurgy)
Sputter deposition
Light-emitting diode
Ultraviolet
radio frequency magnetron sputtering
Optoelectronics
Correction
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