Development of monolithic pixel detector with SOI technology for the ILC vertex detector

We have been developing a monolithic pixel sensor for the International Linear Collider (ILC) vertex detector with the 0.2 ?m FD-SOI CMOS process by LAPIS Semiconductor Co., Ltd. We aim to achieve a 3 ?m single-point resolution required for the ILC with a 20×20 ?m2 pixel. Beam bunch crossing at the ILC occurs every 554 ns in 1-msec-long bunch trains with an interval of 200 ms. Each pixel must record the charge and time stamp of a hit to identify a collision bunch for event reconstruction. Necessary functions include the amplifier, comparator, shift register, analog memory and time stamp implementation in each pixel, and column ADC and Zero-suppression logic on the chip. We tested the first prototype sensor, SOFIST ver.1, with a 120 GeV proton beam at the Fermilab Test Beam Facility in January 2017. SOFIST ver.1 has a charge sensitive amplifier and two analog memories in each pixel, and an 8-bit Wilkinson-type ADC is implemented for each column on the chip. We measured the residual of the hit position to the reconstructed track. The standard deviation of the residual distribution fitted by a Gaussian is better than 3 ?m.