Quantum scale structures of nanocrystalline silicon films

Based on the growth process analysis of nanocrystalline silicon films, a fractal growth model named diffusion and reaction limited aggregation (DRLA) model is proposed, which is different from diffusion limited aggregation model. Nanocrystalline silicon films with quantum scale structures were prepared by PECVD method. Computer simulation of the DRLA model has been done, the results are in agreement with the experimental results. The relationship between structure of nanocrystalline silicon film and aggregation of nanocrystalline silicon film has also been discussed.