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ICDS-18 - PROCEEDINGS OF THE 18TH INTERNATIONAL CONFERENCE ON DEFECTS IN SEMICONDUCTORS, PTS 1-4
ICDS-18 - PROCEEDINGS OF THE 18TH INTERNATIONAL CONFERENCE ON DEFECTS IN SEMICONDUCTORS, PTS 1-4
1995
Ulrich Wahl
Sg Jahn
M. Restle
H. Quintel
H. Hofsäss
Keywords:
Ion implantation
Atomic physics
Chemical physics
Germanium
Semiconductor
Materials science
Silicon
Engineering physics
Correction
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