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DRY DEEP ETCHING OF BULK TITANIUM BY PLASMA PROCESSES
DRY DEEP ETCHING OF BULK TITANIUM BY PLASMA PROCESSES
2015
Edouard Laudrel
Thomas Tillocher
Philippe Lefaucheux
Bertrand Boutaud
Remi Dussart
Keywords:
Dry etching
Reactive-ion etching
Titanium
Plasma
Etching
Composite material
Ceramic materials
Materials science
Metallurgy
Correction
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