Measurements of spatial distributions of electron density and temperature of 450 MHz UHF plasma using laser Thomson scattering
2020
A capacitively coupled Ar plasma was produced by the ultra-high frequency power source (450 MHz) and the plasma parameters were studied by Laser Thomson scattering. It was found that a very high density plasma with a low electron temperature was realized; the electron density ne is around (1.1-1.5) x1018 m-3 and the electron temperature Te is around (1.7-2.1) eV. Radial profiles of ne and Te were obtained for different pressures and powers. In all the conditions explored, ne had a single-center-peak profile, while Te profiles were relatively flat along the electrode.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
35
References
0
Citations
NaN
KQI