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Method for producing a silicon thin film transfer insulator wafer
Method for producing a silicon thin film transfer insulator wafer
2009
syouzi akiyama
yosihiro kubota
atuo itou
sin kawai
kouiti tanaka
yuuzi hi saka
yosihiro nozima
Keywords:
Thin film
Insulator (electricity)
Silicon
Optoelectronics
Wafer
Materials science
silicon thin film
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