A novel approach to developer-soluble anti-reflective coatings for 248-nm lithography
2007
A novel approach to developer-soluble bottom anti-reflective coatings (BARCs) for 248-nm lithography
was demonstrated. The BARC formulations are photosensitive, dye-filled systems incorporated with a
polymer binder. The films are generated by thermally crosslinking the polymer matrix, and are then
photochemically decrosslinked in order to render them soluble in developer solutions. The BARCs are
compatible with solvents commonly used in the industry. Easy modification of the films with regard to
optical properties for potential use with various substrates was also demonstrated. The BARCs exhibit
anisotropic development in aqueous tetramethylammonium hydroxide (TMAH) solutions subsequent to
simulated photoresist application, exposure, and post-exposure bake.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
9
References
6
Citations
NaN
KQI