Cubic centimeter robot based on inertial stick–slip driving

In order to achieve the nano-operation in a limited space, a precision motion platform with a cubic centimeter volume based on the principle of inertial stick–slip driving is proposed in this paper. The mechanical structure and the operating principle are discussed. Kinematic models are used to analyze the performance of the prototype. To investigate the working performance of the prototype, a series of experiments are carried out. Experimental results show that the displacement outputs is related to the parameters of the electrical signal. The maximum moving speed of the platform reaches 13.1 mm/s when the driving frequency is 3.1 kHz. The maximum single step displacement reaches 4.8 μm. Through proper driving voltage and frequency, the proposed prototype can produce a satisfactory velocity.